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Ralf Emberger – Managing Director – Sonosys Ultraschallsysteme …
WebIn experiment III, higher megasonic power is conducive to improve the efficiency of PR removal. It takes 175s and 235s to remove 2 um PR by the megasonic method at the power of 30 W and 15W, respectively(Fig.5). Fig.5 Megasonic rinse at power of 30W and 15W , different process times consumed. IV. CONCLUSION WebHet leveringsprogramma bestaat uit Megasonic generatoren, submersible transducers, Megasonic nozzles en enige speciaal ontwikkelde producten. ASM is partner van Sonosys … ironman imove gen 2 as specs
SONOSYS Ultraschallsysteme GmbH - SEMI
WebSONOSYS® Megasonic systems provide highly efficient removal of nano sized particles from substrates, semiconductor wafers, masks, MEMS and LIGA. Available products: Transducer plates, submersible transducer, Face-To-Face transducer, single and dual nozzles, atomizer and very compact, modular generators up to 2000 Watt. WebThe megasonic nozzle can be configured for a single frequency megasonic beam or two overlapping beams with different frequencies. A high megasonic energy can usually be … WebSONOSYS ® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: [email protected] Technical data Megasonic Single Nozzle Electrical data High Frequency Input: 35 Watt / 1 MHz / 2 MHz / 3 MHz / 4 MHz ironman innerscan manual